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> Epitaxy
Epitaxy
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Tags
manufacturing
homoepitaxy
heteroepitaxy
vapor-phase epitaxy
chemical vapor deposition
molecular-beam epitaxy
thin films
Top Stories & Special Reports
Variability Becoming More Problematic, More Diverse
Published on December 12, 2022
Where Is Selective Deposition?
Published on June 25, 2018
DSA Re-Enters Litho Picture
Published on March 15, 2018
RF GaN Gains Steam
Published on July 25, 2016
Next Challenge: Contact Resistance
Published on June 23, 2016
What Happened To DSA?
Published on May 19, 2016
Increasing Challenges At Advanced Nodes
Published on October 22, 2015
Manufacturing Of Next-Generation Channel Materials
Published on October 5, 2015
Still Waiting For III-V Chips
Published on February 19, 2015
Next Channel Materials?
Published on January 22, 2015
One-On-One: Aaron Thean
Published on January 22, 2015
Counting And Controlling DSA Defects
Published on November 13, 2014
More Problems Ahead
Published on August 25, 2014
Alternative Channel Materials For Post-Silicon FinFETs
Published on December 16, 2013
It’s A Materials World
Published on August 15, 2013
Design-For-DSA Industry Begins To Assemble
Published on April 18, 2013
LED Firms Mull New Wafer Sizes And Materials
Published on August 16, 2012
Research
Mitigating Structural Defects During The Growth Of 2D vdW Chalcogenides By MBE (Penn State Univ.)
Published on November 17, 2025
Epitaxial Growth Of Up To 120 Si/SiGe Bilayers In View of 3D DRAM Applications (imec, Ghent Univ.)
Published on August 5, 2025
Blogs & White Papers
The Effects Of Poly Corner Etch Residue On Advanced FinFET Device Performance
Published on July 21, 2021
How FinFET Device Performance Is Affected By Epitaxial Process Variations
Published on September 25, 2019
The Internet Of Power Also Benefits From Moore’s Law
Published on January 21, 2016
A Semiconductor Approach To Desalination
Published on November 5, 2015
Why DSA Is Cost Effective For 7nm And Below
Published on July 30, 2015
Amazing New Materials
Published on March 20, 2014
Germanium wedge-FETs pry away misfit dislocations
Published on January 23, 2014
Mobility Gets A Boost With Expanded Epi Applications
Published on July 17, 2013
Epitaxy: Seeking Crystalline Perfection
Published on October 18, 2012
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Variation At 10/7nm
October 18th, 2018
Tech Talk: 5/3nm Parasitics
February 22nd, 2018
Parent Centers
Semiconductor Manufacturing