Synthetic Diamond: Emerging CVD Science and TechnologyKarl E. Spear, John P. Dismukes John Wiley & Sons, 04.04.1994 - 688 Seiten A riveting look at the science, technology and people involved in overcoming early impracticalities of the fledgling chemical vapor deposition (CVD) synthesis method and its development in today's state of commercial readiness. Provides insights into numerous vapor phase techniques. Surveys the synthesis, structure, properties and applications of diamondlike carbon. Details current and rapidly emerging applications, manufacturing and markets. |
Inhalt
| 3 | |
| 21 | |
| 41 | |
| 57 | |
Development and Status of Diamondlike Carbon | 91 |
Growth of Diamond by CVD Methods and Effects of Process | 145 |
Vapor Phase Diagnostics in Diamond CVD | 193 |
Mechanisms for CVD Diamond Growth | 243 |
Diamond Electrical Properties and Electronic Device Behavior | 355 |
Optical Properties and Optoelectronic Applications of Diamond | 401 |
Tribology and Wear Behavior of Diamond | 419 |
Industrial Applications of SingleCrystal Diamond | 507 |
Technological Applications of CVD Diamond | 533 |
A Comparative Assessment of CVD Diamond Manufacturing | 581 |
CVD Diamond Markets in the 21st Century | 625 |
Index | 649 |
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Häufige Begriffe und Wortgruppen
a-SiC absorption acetylene Angus Appl atomic hydrogen band gap boron carbide carbon atoms Chapter chemical chemical vapor deposition cm² coatings coefficient combustion concentration cost crystals CVD diamond dangling bonds defects density deposition rate Deryagin diamond CVD diamond deposition diamond films diamond growth diamond surface diamond synthesis diamondlike Dismukes DLC films doping electrical Electrochemical electron emission energy Fedoseev filament films deposited fluorine Frenklach friction Gardos gas phase graphite growth of diamond growth rate H₂ HAC/TSD heat high temperatures HPHT diamond hydrocarbon increase infrared kinetic laser layer Lett lonsdaleite materials mechanism metal methane microwave microwave plasma Moustakas natural diamond nitrogen nondiamond nucleation optical oxygen parameters PCD films phonon Phys plasma polishing pressure Proc properties of diamond radicals Raman reaction semiconductor Setaka shown in Figure silicon sp² sp³ Spear species Spitsyn structure substrate Synthetic Diamond techniques thermal conductivity torr tribological wear
Beliebte Passagen
Seite 22 - Metastable phases can form from precursors with high chemical potential if the activation barriers to more stable phases are sufficiently high. As the precursors fall in energy, they can be trapped in a metastable configuration. Formation of a metastable phase depends on selecting conditions in which rates of competing processes to undesired products are low [2].
Seite 22 - Bridgman (Bridgman, 1955), who said, We know from the thermodynamic potential that graphite is ordinarily the preferred form, but this does not enable us to say that the actual precipitate will be graphite and not diamond. As a matter of fact there are many known instances in which an element's unstable form, corresponding to diamond, separates from a solidifying liquid or solution in preference to the stable form.
Seite 297 - Angus JC, Buck FA, Sunkara M, Groth TF, Hayman CC and Gat...
Seite 23 - In these memoranda he proposed that carbon monoxide be used as a source gas to precipitate diamond on a diamond seed crystal. Growth of diamond seed crystals was achieved in the period 26 November 1952 to 7 January 1953 (Kiffer, 1956).
Seite 301 - Am. Chem. Soc. 108, 5780. Tsuda, M., Nakajima, M., and Oikawa, S. (1987), Jpn. J. Appl. Phys. 26, L527. Tsuda, M., Oikawa, S., Furukawa, S., Sekine, C., and Hata, M. (1992), /. Electrochem. Soc. 139, 1482.
Seite 22 - The unsatisfied dangling bonds normal to the surface are terminated with hydrogen atoms, which maintain the bulk terminated diamond lattice to the outermost surface layer of carbon atoms. When hydrogen is absent, the surface reconstructs into more complex structures. They also showed that carbon atoms are very mobile on the diamond surface at temperatures above 1200 K and stated that these conditions should permit epitaxial growth. Other work [15,16] suggested that the presence of hydrogen enhanced...
Seite 297 - Barnard, JA and Bradley, JN (1985), Flame and Combustion, Chapman and Hall, London.
Seite 103 - ELECTRICAL PROPERTIES AND APPLICATIONS Electrical properties The range of electrical characteristics of diamond-like carbon films are presented in Table I. As can be seen in the table the films are characterized by a bandgap in the range of 1-4 eV, therefor their behavior can vary from that of a semimetal to that of a wide bandgap insulator. Despite this bandgap, DLC or taC films do not behave like typical semiconductors. Their electrical properties can be modeled assuming a band structure consisting...
Seite 138 - Weissmantel, C., Bewilogua, K., Breuer, K., Dietrich, D., Ebersbach, U., Erler, HJ, Rau, B., and Reisse, G. (1982), Preparation and properties of hard iC and i-BN coatings, Thin Solid Films 96, 31-44.
Seite 155 - ... 7.5.1 Plasma-Enhanced CVD Plasmas generated by various forms of electrical discharges or induction heating have been employed in the growth of diamond. The role of the plasma is to generate atomic hydrogen and to produce the necessary carbon precursors for diamond growth. The efficiencies of the different plasma processes vary from method to method. Three plasma frequency regimes will be discussed. These are microwave plasma CVD, which typically uses excitation frequencies of 2.45 GHz; Radiofrequency...
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